Nano- and Micro- Electromechanical Systems. Fundamentals of Nano- and Microengineering
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Author(s): S. E. Lyshevski
Publisher: CRC Press
ISBN: 0849328381
Format: hardback
722pp
Price: $89.95
Review Date: 08 March 2005
Review: This book brings together the concepts, methods, techniques and technologies needed to solve a wide range of problems, including synthesis, modelling, simulation, analysis, design and optimization of high-performance nano- and electromechanical systems (NEMS), microelectromechanical systems (MEMS), devices and structures. In particular, coherent synthesis and design are illustrated with analysis of the phenomena and effects of nano- and micro-scales, development of system architectures, physical representations, optimisation etc. The focus of the book is on NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development.