Silicide Technology for Integrated Circuits
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Author(s): L. J. Chen (Ed.)
Publisher: IEE
ISBN: 0863413528
Format: hardback
279pp
Price: £59.00, $109.00
Review Date: 03 February 2005
Review: This book explains how metal silicide technology is implemented in integrated circuits. The book begins with an introduction to silicone technology. It goes on to have cjhapters on: silicides formation, titanium silicides technology, cobalt silicides technology, nickel silicides technology, light-emitting iron silicides, silicides contacts for Si/Ge devices, silicides technology for SOI devices, and the characterisation of metal silicides.