Metal Based Thin Films for Electronics
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Author(s): K. Wetzig and C. Schneider (Eds)
Publisher: Wiley
ISBN: 3527403655
Format: hardback
378pp
Price: £85.00
Review Date: 31 March 2004
Review: Metal-based thin films play a central role in the different steps of fabrication and are vital for the specific functionality of electronic devices. The authors of the handbook describe and discuss complex metal-based thin film systems and advanced methods for structures, chemical and electronic state characterization with reference to the properties of thin functional layers, such as metallization and barrier layers for microelectronics, magneto-resistive layers for GMR and TMR, sensor and resistance layers. Devices such as high-frequency filters, sensors, x-ray optical systems and thermoelectric sensors are also covered.