Introduction to Semiconductor Manufacturing Technology
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Author(s): H. Xiao
Publisher: Pearson Education
ISBN:  0130224049
Format: hardback
  641pp
Price: £29.99
Review Date: June 25, 2001
Review: For more than 30 years, Moore's Law - that the number of components on a computer chip would double every 12 months, has held true. This book, for technical and college students, describes chip manufacture processes in a semiconductor fab. It focuses on the latest IC fabrication technologies and describes the older technologies, in order to give a historic perspective. The processes chosen are close to those in working fabs, especially on process troubleshooting and process and hardware relations. There are chapters on: semiconductor basics; wafer manufacturing; thermal processes; photolithography; plasma basics; ion implantation; etch; CVD and dielectric thin film; metallisation; chemical mechanical polishing; process integration; and CMOS processing.